发明名称 |
Method of prevention of particle pollution in a pre-clean chamber |
摘要 |
This method of prevention of particle pollution in a pre-clean chamber includes an oxygen gas supplying step for injecting oxygen gas into the pre-clean chamber; and a plasma generating step for ionizing the oxygen gas into plasma so as to interact with silicon-rich oxide to form a silicon oxide layer in the pre-clean chamber. The method according to the invention could prevent particle pollution due to peeling-off of silicon-rich oxide in a pre-clean chamber so as to prolong the life of a bell-jar therein.
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申请公布号 |
US2002164435(A1) |
申请公布日期 |
2002.11.07 |
申请号 |
US20010848375 |
申请日期 |
2001.05.04 |
申请人 |
KUO CHIA-MING;HUANG CHAO-YUAN |
发明人 |
KUO CHIA-MING;HUANG CHAO-YUAN |
分类号 |
C23C14/56;(IPC1-7):H05H1/24 |
主分类号 |
C23C14/56 |
代理机构 |
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代理人 |
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地址 |
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