发明名称 CMOS photodiode having reduced dark current and improved light sensitivity and responsivity
摘要 A light-sensing diode in a high resistivity semiconductor substrate of a first conductivity type, the substrate having a surface protected by an insulator, comprising a first well of the opposite conductivity type in the substrate, forming a junction with the substrate remote from the surface, the well further having sidewall portions; a second well of the first conductivity type fabricated in the substrate, at least partially surrounding the sidewalls of the first well, thereby forming a junction with the first well; the second well further having at least one extension along the surface under the insulator into the first well, thereby buried near-the-surface junctions with the first well and constricting the surface area within which the junction intersect the surface; and contacts for applying electrical bias across the junctions.
申请公布号 US2002162945(A1) 申请公布日期 2002.11.07
申请号 US20010848637 申请日期 2001.05.03
申请人 CHEN ZHILIANG J.;LING KUOK Y.;SHICHIJO HISASHI;KOMATSUZAKI KATSUO;TSAI CHIN-YU 发明人 CHEN ZHILIANG J.;LING KUOK Y.;SHICHIJO HISASHI;KOMATSUZAKI KATSUO;TSAI CHIN-YU
分类号 H01L21/00;H01L27/00;H01L27/146;H01L27/148;H01L31/00;H01L31/062;H01L31/112;H01L31/113;H04N5/335;(IPC1-7):H01L31/00 主分类号 H01L21/00
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