发明名称 Split-mold and method for manufacturing semiconductor device by using the same
摘要 A split-mold, which is used for manufacturing semiconductor devices by resin-encapsulating a substrate on which a plurality of semiconductor chips are formed, includes a first mold and a second mold. The second mold has a pressing surface that is provided with a mold release sheet. The second mold has a mold-release-sheet mechanism holding a mold release sheet outside the pressing surface of the second mold and applying tension to the mold release sheet.
申请公布号 US2002164391(A1) 申请公布日期 2002.11.07
申请号 US20020186997 申请日期 2002.07.02
申请人 FUJITSU LIMITED OF KAWASAKI 发明人 SHINMA YASUHIRO
分类号 H01L23/28;B29C43/18;H01L21/00;H01L21/56;(IPC1-7):B29C70/72 主分类号 H01L23/28
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