发明名称 Semiconductor device and method for fabricating the same
摘要 The semiconductor device and the method for fabricating the same includes a trench formed with a predetermined depth in a region of a substrate. A device isolation film is formed as a sidewall type spacers at both sides of the trench. A second conductivity type semiconductor film is formed in the trench. A second conductivity type transistor is formed in first and second regions of the substrate, and a first conductivity type transistor formed in a third region of the substrate.
申请公布号 US2002163038(A1) 申请公布日期 2002.11.07
申请号 US20020135455 申请日期 2002.05.01
申请人 HYNIX SEMICONDUCTOR INC. 发明人 CHANG HOON;KIM DAE BYUNG
分类号 H01L27/092;H01L21/336;H01L21/762;(IPC1-7):H01L29/76;H01L29/94;H01L31/062;H01L31/113 主分类号 H01L27/092
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