SYSTEM AND METHOD FOR SCHEDULING THE MOVEMENT OF WAFERS IN A WAFER-PROCESSING TOOL

摘要

In a system and method for scheduling the movement of wafers in a wafer-processing tool (100), the wafer-processing tool (100) can include a load module (102), a wafer-transfer unit (104), a process module (116), and a scheduler (118). The scheduler (118) can be configured to generate a schedule for the movement of wafers in the wafer-processing tool (100) based on the duration of the operations to be performed by the wafer-transfer unit (104) and the process module (116) in processing the wafers.