发明名称 METHOD FOR SEPARATING ELECTRONIC COMPONENTS FROM A COMPOSITE
摘要 The invention relates to methods for separating thin chips from a sawn wafer, according to which the wafer is first glued to a carrier and is sawn into individual chips on said carrier. The components are subsequently detached from the carrier individually or in groups. The method is characterised in that the carrier is a rigid plate and the adhesive is thermally soluble, whereby the adhesive is rendered inactive by means of heat passing either through the chip itself or through the carrier. The chip is then detached.
申请公布号 WO02089176(A2) 申请公布日期 2002.11.07
申请号 WO2002EP04001 申请日期 2002.04.10
申请人 MUEHLBAUER AG;BROD, VOLKER;OVERMEYER, LUDGER;MONSER, HANS-PETER 发明人 BROD, VOLKER;OVERMEYER, LUDGER;MONSER, HANS-PETER
分类号 H01L21/50;C09J5/00;C09J5/06;H01L;H01L21/301;H01L21/46;H01L21/66;H01L21/68;H01L21/78 主分类号 H01L21/50
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