发明名称 MULTI-DIRECTIONAL THERMAL ACTUATOR
摘要 A micrometer sized multi-directional thermal actuator capable of repeatable and rapid displacement in a substantially horizontal direction, a substantially vertical direction, and/or a combination thereof. The multi-directional thermal actuator constructed on a surface of a substrate includes three or more beams each cantilevered from one or more anchors at a first end to extend generally parallel to the surface of the substrate. A member mechanically and electrically couples the distal ends of the beams. Application of current to a circuit comprising combinations of any two or more of the beams displaces the member in one of three or more non-parallel radial directions, respectively.
申请公布号 WO02088018(A2) 申请公布日期 2002.11.07
申请号 WO2002US03679 申请日期 2002.02.07
申请人 3M INNOVATIVE PROPERTIES COMPANY 发明人 GOETZ, DOUGLAS, P.;HAMERLY, MICHAEL, E.;PENDERGRASS, DANIEL, B., JR.;SMITH, ROBERT, G.;THEISS, SILVA, K.;WEAVER, BILLY, L.
分类号 B81B3/00;H02N10/00 主分类号 B81B3/00
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