SYSTEM AND METHOD FOR FILTERING OUTPUT IN MASS FLOW CONTROLLERS AND MASS FLOW METERS

摘要

The invention provide a method and system for filtering an indicated flow comprising a mass flow meter operable having a filter (230) for indicated flow to derive intermediate filtered indicated (235), deriving a eighted first derivative of the filtered indicated flow (235), and deriving an indicated flow (235) from the sumof the intermediate filtered indicated flow (235) and the weighted first derivative of the intermediate filtered indicated flow (235).