发明名称 |
Carrier head with a compressible film |
摘要 |
A compressible film that is detachably securable to a surface of a rigid structure in the carrier head. The compressible film has a plurality of apertures positioned to create a non-uniform pressure distribution on a substrate during polishing so as to improve polishing uniformity. The apertures may be spaced and positioned to provide a pressure distribution on the substrate that is locally uniform but globally non-uniform.
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申请公布号 |
US2002164938(A1) |
申请公布日期 |
2002.11.07 |
申请号 |
US20020187143 |
申请日期 |
2002.06.28 |
申请人 |
APPLIED MATERIALS, INC., A DELAWARE CORPORATION |
发明人 |
CHEN HUNG CHIH;ZUNIGA STEVEN M. |
分类号 |
B24B37/00;B24B37/04;B24B41/06;B24B49/16;H01L21/302;H01L21/304;(IPC1-7):B24B5/00;B24B29/00;B24B47/02 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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