发明名称 VORRICHTUNG ZUR OPTISCHEN ABTASTUNG VON OBJEKTEN AUF EINER ABTASTFLÄCHE SOWIE VERFAHREN ZU IHREM BETRIEB
摘要 PCT No. PCT/CH96/00165 Sec. 371 Date Mar. 3, 1997 Sec. 102(e) Date Mar. 3, 1997 PCT Filed Apr. 29, 1996 PCT Pub. No. WO96/35136 PCT Pub. Date Nov. 7, 1996The optical monitoring of a standing wave by an optical probe (5) in the region of the overlap beween an incident and reflected monochromatic light beam in the region of the surface of a substrate consisting of a transparent (2) and an opaque (1) layer faciliates an optical holographic image with improved lateral resolution. The lateral resolution is limited by the optical fields in the edge region of the probe (11) and not directly by the expansion of the probe aperture. The lateral resolution is additionally increased by the one-sided coating of the probe and narrowing the probe aperture in the direction of the incident light beam.
申请公布号 DE59609746(D1) 申请公布日期 2002.11.07
申请号 DE1996509746 申请日期 1996.04.29
申请人 BACSA, WOLFGANG 发明人 BACSA, WOLFGANG
分类号 G01B11/30;G01N37/00;G01Q60/00;G01Q60/18;(IPC1-7):G02B21/00 主分类号 G01B11/30
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