| 摘要 |
The invention relates to a device for simultaneously tempering and processing several process goods by means of electromagnetic radiation. The device is a batch-type furnace. The process goods and the energy sources are arranged adjacent to each other in such a way that a process good is situated between two energy sources and an energy source is situated between two process goods. The device is especially useful for tempering the process goods in the presence of a process gas. A variable heating and cooling profile having variable processing parameters (e.g. gas pressure, heating rate, cooling rate) can be obtained using the inventive device. It is especially possible to securely temper a process good in the form of a large-surface multilayer body comprising layers of different physical characteristics (thermal conductivity coefficient, temperature expansion coefficient, absorption and emission capacity, etc.). According to the inventive method and device, a toxic and/or corrosive process gas can be used for processing the process good. The device and the method are useful for producing thin film solar modules for instance. |
