| 摘要 |
<p>A method and apparatus for transferring substrates is provided. In one embodiment, an apparatus for transferring substrates includes a first evacuable chamber and a evacuable second chamber separated by a third chamber, and a first transfer mechanism. The first transfer mechanism is movable between a first position located in the first chamber and a second position located in the third chamber. The first transfer mecnanism includes a first seal plate coupled to a second seal plate and one or more substrate holders. The seal plates provides vacuum seals on opposing sides of the first chamber thereby balancing a force required to hold the first transfer mechanism and seal the first chamber from the third chamber during transfer of substrates from the substrate holder.</p> |
