| 摘要 |
<p>Low resistance metal/semiconductor and metal/insulator contacts (20) incorporate metal nanocrystals embedded (18) in another metal having a different work function. The contacts are fabricated by placing a wetting layer (14) of a first metal (18) on a substrate (10), which may be a semiconductor or an insulator and then heating to form nanocrystals on the semiconductor or insulator surface. A second metal (20) having a different work function than the first is then deposited on the surface so that the nanocrystals are embedded in the second material.</p> |
