LAMINATED CO-FIRED SANDWICHED ELEMENT FOR NON-THERMAL PLASMA REACTOR

摘要

A method for preparing a non-thermal plasma reactor substrate (160) includes disposing electrical vias (110) on green stage first and second ceramic plates (100), (144); filling the electrical vias (11) with conductive material; and forming electrical contact via cover pads (130); disposing conductive material on the first ceramic plate (100) to form an electrode plate (126) having a main electrode portion (124) and a terminal lead (127) for electrically connecting the main electrode portion (124) to the electrical vias (110); laminating the electrode plate (126) and the second ceramic plate (144) together, embedding the electrode (124) therebetween; co-firing the plates (126), (144) to form a laminated co-fired embedded-conductor element (148); stacking a plurality of the laminated co-fired embedded-conductor elements 148 to form a multi-cell stack (160), the filled electrical vias (110) aligning in the stack (160) to provide an electrical bus for connecting alternating elements (148) in the stack (160); and disposing spacers (146) with matching vias (110) and via cover pads (130) between adjacent pairs of elements (148) to form exhaust gas passages (162).