Linear resonance pump and methods for compressing fluid

摘要

A pump and methods for compressing a fluid are provided that comprise a pump head comprising a flexible metal diaphragm attached to a rigid compression chamber. Fluid compression is provided within the rigid compression chamber when the flexible diaphragm is mechanically oscillated back and forth by a linear motor operated at a drive frequency that is at or below the mechanical resonance of the moving parts, mechanical springs and gas springs. Tuned ports and valves allow low-pressure fluid to enter and high-pressure fluid to exit the compression chamber in response to the cyclic compressions. The linear resonance pump provides high frequency operation, small diaphragm displacements, and high compression ratios for gases.