SILICON MICROMACHINED OPTICAL DEVICE

摘要

An apparatus at least partially intercepts a plurality of light beams propagating along a respective plurality of beam paths. The apparatus includes a single crystal silicon substrate (20) and an array including a plurality of modules. Each module (32) includes a reflector (40) comprising single crystal silicon and a reflector surface (42) lying in a reflector plane (44) substantially perpendicular to the substrate surface. Each module further includes a reflector support which mounts the reflector to move substantially within the reflector plane with a displacement component along the surface normal direction of the substrate surface. Each module further includes a reflector driver responsive to electrical current to selectively move the reflector between a first position and a second position.