| 发明名称 |
Method and apparatus for detecting and latching the position of a MEMS moving member |
| 摘要 |
An apparatus for detecting the position of an optical element includes an actuator coupled to the optical element. A sensor coupled to the optical element senses the movement of the optical element. The sensor includes a moveable electrode coupled to the optical element for outputting a position detection signal.
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| 申请公布号 |
US2002163709(A1) |
申请公布日期 |
2002.11.07 |
| 申请号 |
US20020137857 |
申请日期 |
2002.05.03 |
| 申请人 |
MIRZA AMIR RAZA |
发明人 |
MIRZA AMIR RAZA |
| 分类号 |
G02B6/12;G02B6/132;G02B6/136;G02B26/02;G02B26/08;(IPC1-7):G02B26/00;G02B7/02 |
主分类号 |
G02B6/12 |
| 代理机构 |
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代理人 |
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| 主权项 |
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