发明名称 |
Method and arrangement for compensating for imaging defects |
摘要 |
A scanning microscope has at least one illumination source for emitting a light beam, which is fed via a microscope optic to a specimen and scans the latter. In order to correct the imaging defect of the microscope optic, said defect is determined and a correction value is determined therefrom. This correction value is used for influencing control signals which control the impinging of the light beam on the specimen.
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申请公布号 |
US2002162955(A1) |
申请公布日期 |
2002.11.07 |
申请号 |
US20020106533 |
申请日期 |
2002.03.26 |
申请人 |
LEICA MICROSYSTEMS HEIDELBERG GMBH |
发明人 |
ENGELHARDT JOHANN |
分类号 |
G02B21/00;(IPC1-7):H01J3/14;H01J5/16 |
主分类号 |
G02B21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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