发明名称 High-frequency line
摘要 A method for forming at least one conductive line intended to receive high-frequency or high-value currents, formed above a given portion of a solid substrate outside of which are formed other elements, including the steps of digging at least one trench in the solid substrate; forming an insulating area in the trench; and forming said conductive line above the insulating area.
申请公布号 US2002164867(A1) 申请公布日期 2002.11.07
申请号 US20020117782 申请日期 2002.04.05
申请人 JOAQUIM TORRES;VINCENT ARNAL;ALEXIS FARCY 发明人 JOAQUIM TORRES;VINCENT ARNAL;ALEXIS FARCY
分类号 H01L21/3205;H01L23/522;(IPC1-7):H01L21/476 主分类号 H01L21/3205
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