发明名称 |
High-frequency line |
摘要 |
A method for forming at least one conductive line intended to receive high-frequency or high-value currents, formed above a given portion of a solid substrate outside of which are formed other elements, including the steps of digging at least one trench in the solid substrate; forming an insulating area in the trench; and forming said conductive line above the insulating area.
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申请公布号 |
US2002164867(A1) |
申请公布日期 |
2002.11.07 |
申请号 |
US20020117782 |
申请日期 |
2002.04.05 |
申请人 |
JOAQUIM TORRES;VINCENT ARNAL;ALEXIS FARCY |
发明人 |
JOAQUIM TORRES;VINCENT ARNAL;ALEXIS FARCY |
分类号 |
H01L21/3205;H01L23/522;(IPC1-7):H01L21/476 |
主分类号 |
H01L21/3205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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