Method of quantitative determination of an image drift in digital imaging microscope

摘要

A method of quantitative determination of an image drift in a digital imaging microscope includes using a pattern which has a plurality of three-dimensional features spaced from one another into mutually perpendicular directions, producing a set of images of the pattern within certain time intervals therebetween, and determining an offset of each of the features in the set of the thusly obtained images as an image thrift.