发明名称 Halbleiterbauelement, insbesondere ein mikromechanischer Drucksensor
摘要 The invention relates to, in particular, a semiconductor component, particularly a micromechanical pressure sensor (200), comprising a membrane electrode (206), a cavity (208), which is located underneath the membrane, and a bottom electrode (202, 203), which is also located underneath the membrane. In order to improve the reliability of the semiconductor component, the invention provides, in particular, a bottom electrode that is comprised of a first and a second electrode (202, 203), whereby the second electrode (203) surrounds the first electrode (202) to a large extent.
申请公布号 DE10121394(A1) 申请公布日期 2002.11.07
申请号 DE20011021394 申请日期 2001.05.02
申请人 ROBERT BOSCH GMBH 发明人 JUNGER, ANDREAS;BENZEL, HUBERT;ESCHRICH, HEINZ;NITSCHE, JUERGEN;SCHAEFER, FRANK;VOSSENBERG, HEINZ-GEORG
分类号 G01L9/00;(IPC1-7):B81B3/00 主分类号 G01L9/00
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