PARTICLE BEAM CURRENT MONITORING TECHNIQUE,申请号EP19990938730-传众专利搜索

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发明名称	PARTICLE BEAM CURRENT MONITORING TECHNIQUE
摘要
申请公布号	EP1101123(B1)	申请公布日期	2002.11.06
申请号	EP19990938730	申请日期	1999.07.13
申请人	VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INC.	发明人	RICHARDS, STEVEN, L., F.;TOKORO, NOBUHIRO
分类号	G21K5/04;B01J19/08;G01R19/00;G01T1/29;H01J37/317;H01L21/265;(IPC1-7):G01R31/25	主分类号	G21K5/04
代理机构		代理人
主权项
地址

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