| 发明名称 |
SEMICONDUCTOR MANUFACTURING/TESTING CERAMIC HEATER |
| 摘要 |
<p>An object of the present invention is to provide a ceramic heater for a semiconductor producing/examining device wherein a scattering in the resistance value of its resistance heating element is hardly generated and its heating face is excellent in temperature evenness. The present invention is a ceramic heater for a semiconductor producing/examining device having a resistance heating element formed on a surface of a ceramic substrate, wherein a gutter is formed along the direction of current flowing through the resistance heating element. <IMAGE></p> |
| 申请公布号 |
EP1255284(A1) |
申请公布日期 |
2002.11.06 |
| 申请号 |
EP20010951942 |
申请日期 |
2001.07.19 |
| 申请人 |
IBIDEN CO., LTD. |
发明人 |
ITO, ATSUSHI;KARIYA, SATORU |
| 分类号 |
H01L21/00;H01L21/683;(IPC1-7):H01L21/02;H05B3/20;H01L21/68 |
主分类号 |
H01L21/00 |
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