发明名称 |
Filter unit, chemical liquid supply system, and chemical liquid supply method |
摘要 |
A filter unit in which a solution storage chamber for storing a chemical liquid supplied from a solution tank and a filter material housing chamber for filtering the chemical liquid in the solution storage chamber by a filter to supply the chemical liquid to a pump are integrally formed is integrally arranged together with the pump. An exhaust path for exhausting air in a solution guide path for causing the solution storage chamber to communicate with the solution tank and the solution storage chamber, and a pump inlet-side path for causing the filter material housing chamber to communicate with the pump are arranged. <IMAGE> |
申请公布号 |
EP1240932(A3) |
申请公布日期 |
2002.11.06 |
申请号 |
EP20010402405 |
申请日期 |
2001.09.19 |
申请人 |
KOGANEI CORPORATION |
发明人 |
YAJIMA, TAKEO |
分类号 |
G03F7/16;B01D19/00;B01D29/60;B01D29/90;B01D29/92;B01D35/02;B01D35/26;B01D36/00;B01D37/04;B01D61/18;B01D61/20;B01D63/02;B01D65/00;B01J4/00;B05C11/10;F04B23/02;F04B49/00;F04B53/20;H01L21/027 |
主分类号 |
G03F7/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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