PVD vapor source

摘要

Apparatus includes a tubular source for thermal physical vapor deposition of organic layers in making organic light-emitting devices defines a cavity for receiving organic material. The tubular source (210) is controllably heated to vaporize the organic material in the cavity (212) and to provide a vapor stream exiting the cavity through a line of openings (214) extending into the cavity. The apparatus defines a reduced pressure chamber having the tubular source and an OLED structure on which is deposited an organic layer. Relative motion between the source and the structure ensures that a relatively uniform layer of organic material is deposited on the structure. <IMAGE>