| 摘要 |
PURPOSE: An organic layer evaporation equipment is provided to allow a relatively uniform layer of organic material to be deposited on the structure by relative motion between the source and the structure. CONSTITUTION: Apparatus for vapor-depositing an organic layer onto a structure which provides part of an organic light-emitting device comprises a housing defining a chamber and a pump connected to the chamber for producing a reduced pressure therein, the structure being positioned in the chamber in a deposition zone, a tubular thermal physical vapor deposition source(210) disposed in the chamber and spaced from the structure, the source defining a cavity for receiving organic material to be vaporized, and the organic material having a vapor pressure which is substantially greater than the reduced pressure in the chamber, the tubular physical vapor deposition source defining a line of openings(214) extending into the cavity, the line of openings being arranged so that vaporized organic material is deposited into the deposition zone onto the structure, a unit for controllably heating the tubular vapor deposition source to cause the organic material to form a vapor at a controlled rate, the vapor being distributed throughout the cavity and exiting the cavity through the line of openings at a controlled rate, and a unit for providing relative linear motion between the tubular vapor deposition source and the structure so that the vapor of organic material in the deposition zone causes formation of a uniformly thick vapor-deposited organic layer on the structure.
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