| 摘要 |
PURPOSE: To provide a micro mirror element capable of giving variety to a means for designing a torsion bar, and of accurately finishing each part of the torsion bar to a desired size, and a method for manufacturing the micro mirror element. CONSTITUTION: The method for manufacturing the micro mirror element contains a process for forming a first mask pattern 10 for masking the part to be processed to a frame 113 and a mirror forming part 111 on a substrate 110', a process for forming a second mask pattern 20 for masking the part to be processed to a bridge linking part 112 on the substrate 110', a process for executing a first etching process to the substrate 110' letting the first and second mask patterns 10, 20 as masks, a process for selectively removing the second mask pattern 20, a process for executing a second etching process to the substrate 110' letting the first mask pattern 10 as the mask, and a process for removing the first mask pattern 10.
|
