发明名称 |
Charged particle beam apparatus |
摘要 |
It is an object of the present invention to provide a charged particle beam apparatus which can avoid charge-up without reducing the dose to a sample. For achieving such an object, the charged particle beam apparatus of the present invention is a charged particle beam apparatus comprising irradiating means for irradiating a sample with a charged particle beam, and imaging means for capturing a two-dimensional image of a secondary beam generated from the sample upon irradiation with the charged particle beam; wherein the irradiating means is means for irradiating a partial region within an imaging field of view of the imaging means with the charged particle beam by shaping a cross section of the charged particle beam; the apparatus further comprising moving means for moving the partial region such that the partial region scans the imaging field of view as a whole at least once. |
申请公布号 |
US2002158198(A1) |
申请公布日期 |
2002.10.31 |
申请号 |
US20010800481 |
申请日期 |
2001.03.08 |
申请人 |
NIKON CORPORATION |
发明人 |
KOHAMA YOSHIAKI;OKUBO YUKIHARU |
分类号 |
G01N23/20;G01N23/225;G03F1/08;G03F1/84;G03F1/86;G21K1/08;G21K7/00;H01J37/147;H01J37/20;H01J37/21;H01J37/22;H01J37/26;H01J37/29;(IPC1-7):G21K7/00;G01N23/00 |
主分类号 |
G01N23/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|