OPTICAL LITHOGRAPHIC DEVICE COMPRISING MACHINE FRAME COMPENSATING FORCE

摘要

PROBLEM TO BE SOLVED: To settle a defect wherein a machine frame is shaken relative to a bottom surface, which affects precision of an optical lithographic device. SOLUTION: The optical lithographic device comprises a machine frame fixed to a lens system 11 comprising a vertical optical main axis 13. It is provided with a force actuator system 67 which is fixed to a reference frame 83 and controlled by a feed forward control system. A compensating force is generated at a support member with a value substantially equal to a value of a reactive force in the direction reverse to the reactive force occurring at the support member simultaneously by an aligning device, the control system further comprises a negative feed back of acceleration, and the force actuator system makes the support member to generate a control force which is decided by the acceleration of the support member 3 measured by an acceleration transducer.