COMPUTER PROGRAM FOR DETERMINING CORRECTED POSITION OF MEASURED ALIGNMENT MARK, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY

摘要

PROBLEM TO BE SOLVED: To provide a computer program for determining a corrected position of a measured alignment mark P on a substrate W which is exposed in a lithographic projection apparatus. SOLUTION: The computer program is provided to determine a corrected position of an alignment mark P on the substrate W which is exposed in the lithographic projection apparatus. In the case where the computer program is run on a computer system, in order to measure the position of at least one alignment mark P on the substrate W on which an aluminum Al layer is coated, a program code means, which commands the computer system, is contained to perform a stage for control a measuring device, and a stage for calculating a corrected position of the alignment mark based on the measurement position of the alignment mark and a model of a working device engaged in coating of the aluminum layer.