| 摘要 |
The aim of the invention is to determine a temperature on a semiconductor component (1). To this end, an inquiry light wave (7) is irradiated onto a measuring point located on the semiconductor component, a response light wave (8, 8') radiated by the measuring point is detected, and the temperature of the measuring point is determined on the basis of a temperature-dependent property (R) of the response light wave (8, 8').
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