| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a multi-frequency surface acoustic wave filter that can widely be compatible with a frequency band and specifications of a SAW filter independently of the property of a piezoelectric substrate and that can manufacture a high quality interdigital transducers(IDT) with excellent power capacity. SOLUTION: The tasks above can be solved by the manufacturing method for multi-frequency surface acoustic wave filters for manufacturing at least two surface acoustic wave filters with different electrode film thickness on a single piezoelectric substrate and characterized in that the method includes a step of preparing the piezoelectric substrate on the major side of which the conductive film with the maximum film thickness required for the two or more surface acoustic wave filters are formed, a step of adjusting the film thickness of a required part of the conductive film so as to attain a required film thickness for the two or more surface acoustic wave filters by means of etching, and a step of applying photo lithography to the conductive film with different film thickness so as to integrally form interdigital transducers for each surface acoustic wave filter.
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