| 摘要 |
PROBLEM TO BE SOLVED: To enhance stability of a TEM sample contacting on an attaching face, and to reduce an influence affected by a characteristic X-ray from the attaching table resulting from a scattered electron beam. SOLUTION: The TEM sample 3 is attached on the attaching face 2a of the attaching table 1a. A bottom face of the TEM sample 3 is inclined by 30 deg., and the attaching face 2a is also inclined by 30 deg.. The TEM sample 3 is attached to an end part of the second surface side in the attaching table 1a out of the attaching face 2a. The whole bottom face of the TEM sample 3 contacts with the attaching face 2a, since both the bottom face of the TEM sample 3 and the attaching face 2a of the attaching table la are inclined by the same angle.
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