METHOD FOR MANUFACTURING ALUMINUM-ALLOY TARGET MATERIAL, AND ALUMINUM-ALLOY TARGET MATERIAL OBTAINED BY THE METHOD

摘要

PURPOSE: A method for manufacturing an aluminum-alloy target material where aluminum-carbon phases in an aluminum matrix are finely precipitated without causing much segregation is provided. CONSTITUTION: In the method for manufacturing the aluminum-alloy target material in which carbon is incorporated in aluminum, an aluminum-carbon alloy where aluminum-carbon phases are dispersed finely and uniformly in an aluminum matrix is produced by putting aluminum into a carbon crucible; heating the aluminum matrix up to 1,600-2,500 deg.C; melting the aluminum to form aluminum-carbon alloy in the carbon crucible; and cooling/solidifying the aluminum-carbon alloy in a molten state; or the resultant solidified aluminum-carbon alloy is remelted and an additive element such as magnesium is added to the remelted alloy, followed by casting after agitation.