| 摘要 |
PROBLEM TO BE SOLVED: To suppress increase in the area of an inspection circuit and wiring regions, and to shorten inspection time. SOLUTION: When the write/read out time t(i-1) for test data TD to/from a RAM, which is the last object to be inspected, is equal to or longer than the write/read out time t(i) of test data TD to/from a RAM, which is the present object to be inspected [t(i-1)>=t(i)], the inspection on the present RAM is started, when 2×t(i-1)-t(i)} time has elapsed, after the inspection on the last RAM is started. When the write/read out time t(i-1) of test data TD to/from the last RAM is shorter than the write/read out time t(i) of test data to/from the present RAM [t(i-1)<t(i)], inspection on the present RAM is started, when t(i-1) time is elapsed, after the inspection on the last RAM has started.
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