TRANSPORT BOX FOR OPTICAL MASKS

摘要

The invention relates to a transport box (10) for optical masks (11) used during the production of semiconductor substrates. Said box is provided with a closable housing composed of an upper part (13) and a lower part (12), between which the masks (11) are held in a parallel manner. A receiving element (21) comprising compartments (26) and supporting a longitudinal edge (57) of the mask (11) is provided in the lower part (12), and a holding device (30) is provided in the upper part (13). The aim of the invention is to enable the masks to be positioned in one such transport box in a vibrationless manner. To this end, the holding device (30) is formed from two angled ridges (31, 32) which are parallel to the corner regions of the masks (11); one side (37) of each angled ridge (31, 32) comprises successively arranged holding-down tongues (38), a longitudinal edge region of the mask being received in the grooves (43) of the same; and the other side (33) of each angled ridge (31, 32) comprises successively arranged lateral guiding elements.