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发明名称
VERFAHREN ZUM BESCHICHTEN MIT DÜNNEN METALLSCHICHTEN VON GRUPPE III A-METALLEN
摘要
申请公布号
DE69431443(D1)
申请公布日期
2002.10.31
申请号
DE19946031443
申请日期
1994.07.29
申请人
QINETIQ LTD., LONDON
发明人
JONES, ANTHONY COPELAND
分类号
C01G15/00;C23C16/18;C23C16/20;C23C18/08;C23C18/10;(IPC1-7):C23C16/18
主分类号
C01G15/00
代理机构
代理人
主权项
地址
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