| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for correcting the error of a position detecting sensor, that enhances detection precision, and to provide a positioning device applied with error correction. SOLUTION: This method for correcting a position detection signal comprises a step for incorporating the position detecting sensor and an actuator into a positioning stage, then giving command values at prescribed intervals, and obtaining the detected value of the incorporated position detecting sensor for every command value, a step for obtaining the detected value of a highly precise sensor set outside the positioning stage for every command value to be given at the prescribed interval, a step for obtaining a correction value from a difference between the detected value of the position detecting sensor and the detected value of the highly precise sensor for every command value, a step for storing the correction value in a storage means in the control circuit of the positioning device as a correction table corresponding to the command value, and a step for correcting the detected value of the position detecting sensor by reading the correction value corresponding to the command value from the correction table at the time of using the positioning device.
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