摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray radiographic equipment capable of easily displaying or storing the enlarged X-ray fluoroscopic images of a specific section among sections of the same shape even if a large number of the sections of the same shape such as leads of a semiconductor device are arranged. SOLUTION: By specifying a plurality of the sections of interest on the X-ray fluoroscopic images photographed at a predetermined magnifying power, a series of codes are automatically added to the specified sections of interest to label them, and the labeled X-ray fluoroscopic images are displayed as master images on a display 9. By automatically driving a positioning mechanism 6 in such a way as to bring a desired section at the center of the field of view of an X-ray detector 2 and automatically driving a detector driving mechanism 4 or a sample table driving mechanism 5 so as to obtain a previously set magnification of photographing when a code corresponding to the desired section is inputted from the contents of the display, it is possible to easily obtain the enlarged X-ray fluoroscopic image of the desired section without the need for positioning operation, etc., by an operator.
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