| 摘要 |
Disclosed is a FeCoNiN-based soft magnetic thin film composition having the formula FexCoyNizNv, wherein x, y, z and v are expressed in at % and satisfy 41<=x<=55, 18<=y<=27, 19<=z<=32, 0<v<=5, and x+y+z+v=100. The Fe-based ultrafine crystalline soft magnetic thin film composition is prepared by the more simplified method and much more excellent soft magnetic properties in the high-frequency than the conventional soft magnetic thin film compositions.
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