发明名称 METAL ELECTRODE FOR LIGHT EMITTING DIODE USING N-TYPE ZINC OXIDE AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: A metal electrode for an LED(Light Emitting Diode) using an n-type ZnO and a method for manufacturing the same are provided to easily form an excellent ohmic contact by using transition metals having melting point of high temperature. CONSTITUTION: A light emitting diode(100) comprises an alumina(Al2O3) substrate(110), an n-type zinc oxide(ZnO) semiconductor(120) formed on the alumina substrate(110), and a metal electrode(130) formed on the ZnO semiconductor(120). The metal electrode(130) is composed of transition metals having a melting point of high temperature. Preferably, the transition metal is one selected from groups composing of Ru, Hf, Ir, Mo, Re, W, V, Pt, Pd and Ta. Also, the melting point of the transition metal is about 1500-3500°C.
申请公布号 KR20020082637(A) 申请公布日期 2002.10.31
申请号 KR20010022331 申请日期 2001.04.25
申请人 KWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 KIM, GYEONG GUK;KIM, HAN GI;PARK, SEONG JU;SUNG, TAE YEON
分类号 H01L21/28;H01L21/285;H01L33/28;H01L33/40;(IPC1-7):H01L33/00 主分类号 H01L21/28
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