| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer holder that can surely hold a wafer, even when the holder is rotated at a high speed and will not produce complicated flexures on the surface of the wafer, while the holder is holding the wafer. SOLUTION: A wafer-receiving seat 13 on which the peripheral edge of the wafer is put, when the wafer is placed on a rotary supporting plate 12 is provided coaxially on the plate 12 along the peripheral edge of the plate 12, and a required number of chuck levers 25 is installed to the seat 13 in a state with the levers 25 can be rotated around their axial centers being oriented in the directions of tangential lines with respect to the circumference of the plate 12. At the same time, springs 28, which urge the front ends of the chuck levers 25 toward the wafer receiving seat 13, are provided so as to pinch peripheral edge of the wafer put on the seat 13 between the seat 13 and chuck levers 25.</p> |
