发明名称 Method and apparatus for generating values for selected pixels used in evaluating semiconductor wafer bumps
摘要 Plural light sources are provided for directing ring patterns of light toward at least one reflective bump formed on and projecting from a first wafer surface of a semiconductor wafer. The intensity of light from the light sources may be varied and may be varied independently of one another. A method and apparatus for adjusting at least one pixel value is also disclosed.
申请公布号 US2002158643(A1) 申请公布日期 2002.10.31
申请号 US20020047980 申请日期 2002.01.11
申请人 ELECTROGLAS INC. 发明人 VILLALOBOS LEDA
分类号 H01L21/00;H01L23/485;(IPC1-7):G01R31/308 主分类号 H01L21/00
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