发明名称 |
Method and apparatus for generating values for selected pixels used in evaluating semiconductor wafer bumps |
摘要 |
Plural light sources are provided for directing ring patterns of light toward at least one reflective bump formed on and projecting from a first wafer surface of a semiconductor wafer. The intensity of light from the light sources may be varied and may be varied independently of one another. A method and apparatus for adjusting at least one pixel value is also disclosed.
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申请公布号 |
US2002158643(A1) |
申请公布日期 |
2002.10.31 |
申请号 |
US20020047980 |
申请日期 |
2002.01.11 |
申请人 |
ELECTROGLAS INC. |
发明人 |
VILLALOBOS LEDA |
分类号 |
H01L21/00;H01L23/485;(IPC1-7):G01R31/308 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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