发明名称 |
SEMICONDUCTOR DEVICE AND RADIO COMMUNICATION SYSTEM |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device in which the reliability of an element can be enhanced. SOLUTION: The semiconductor device comprises a gallium arsenide substrate 101. A through hole 125 is made between the opposite sides of the substrate 101. A first electrode formed on one side 101a of the substrate 101 and a second electrode 103 formed on the other side 101b of the substrate 101 are connected through a metal line 102 formed along the inner wall 108 of the through hole 125. The gallium arsenide substrate 101 is grown epitaxially by a vertical Bridgman method.
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申请公布号 |
JP2002319586(A) |
申请公布日期 |
2002.10.31 |
申请号 |
JP20010124151 |
申请日期 |
2001.04.23 |
申请人 |
SHARP CORP |
发明人 |
MATSUMOTO NOBUYUKI;FUJITA KOICHIRO;RYU YOKU;SHIRAKAWA KAZUHIKO;YAMASHITA MASAHARU |
分类号 |
H01L29/41;H01L21/3205;H01L21/331;H01L21/768;H01L21/822;H01L21/8222;H01L23/52;H01L27/04;H01L27/082;H01L29/737;(IPC1-7):H01L21/320 |
主分类号 |
H01L29/41 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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