发明名称 SYSTEM AND METHOD FOR A MASS FLOW CONTROLLER
摘要 A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operating with a fluid and/or operating conditions different from that used during a production of the mass flow controller. Further, the system and method includes providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device.
申请公布号 WO02086632(A2) 申请公布日期 2002.10.31
申请号 WO2002US13010 申请日期 2002.04.24
申请人 UNIT INSTRUMENTS, INC. 发明人 LULL, JOHN, M.;WANG, CHIUN;VALENTINE, WILLIAM, S.;SAGGIO, JOSEPH, A., JR.
分类号 G01F1/00;G01F25/00;G05B5/01;G05B11/36;G05B13/04;G05D7/06 主分类号 G01F1/00
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