发明名称 |
SYSTEM AND METHOD FOR A MASS FLOW CONTROLLER |
摘要 |
A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operating with a fluid and/or operating conditions different from that used during a production of the mass flow controller. Further, the system and method includes providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device. |
申请公布号 |
WO02086632(A2) |
申请公布日期 |
2002.10.31 |
申请号 |
WO2002US13010 |
申请日期 |
2002.04.24 |
申请人 |
UNIT INSTRUMENTS, INC. |
发明人 |
LULL, JOHN, M.;WANG, CHIUN;VALENTINE, WILLIAM, S.;SAGGIO, JOSEPH, A., JR. |
分类号 |
G01F1/00;G01F25/00;G05B5/01;G05B11/36;G05B13/04;G05D7/06 |
主分类号 |
G01F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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