发明名称 GRATING STRUCTURES AND METHODS OF MAKING THE GRATING STRUCTURES
摘要 <p>New grating structures include a bonded transmission grating structure. The grating structure is encapsulated by two pieces that are bonded together. In addition, a new method of making grating structures includes forming wells with an aspect ratio (depth:width) of at least 3:1, 7:1 or greater. Such grating structures can be used to form gratings with high diffraction efficiencies for both TE and TM polarezations of light.</p>
申请公布号 WO2002086560(A2) 申请公布日期 2002.10.31
申请号 IB2002002871 申请日期 2002.02.20
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