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发明名称
Halbleiteranordnung mit Siliciumnitridschichten und Herstellungsverfahren hierfuer
摘要
申请公布号
DE1521503(A1)
申请公布日期
1969.09.18
申请号
DE19661521503
申请日期
1966.06.23
申请人
SPERRY RAND CORP.
发明人
CONRAD TOMBS,NIGEL
分类号
C23C16/34;G11C16/04;H01L21/033;H01L21/311;H01L21/318;H01L29/00
主分类号
C23C16/34
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代理人
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