| 摘要 |
PROBLEM TO BE SOLVED: To keep the adhesive thickness between disks at a specified value by always maintaining the viscosity of an adhesive for bonding a plurality of disks at a constant level. SOLUTION: A constant flow rate pump 22 supplies the adhesive 32 to a nozzle 23 by a constant flow rate through an adhesive supply pipe 31. The nozzle 23 drops the adhesive on the surface of a lower layer substrate 26. A pressure sensor 11 measures the pressure of the adhesive in the adhesive supply pipe 31, converts it into an electrical potential, and then send it out to an arithmetic circuit 12. The arithmetic circuit 12 calculates the viscosity of the adhesive from the electrical potential, and outputs control information adequate for the calculated viscosity. A spin motor control part 13 controls the rotational speed of the lower layer substrate 26 in time series on the basis of the control information. When the lower layer substrate 26 is superposed on an upper layer substrate 27, a superposition control part 14 controls pressure applied in the upward direction of the lower layer substrate 26 on the basis of the control information.
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