| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of inspecting a trace of probing needle capable of readily and accurately determining only the trace of a probing needle applied on a pad irrespective of the surface condition of the pad. SOLUTION: Image data A, B is obtained before and after the trace 3 of the probing needle is applied on the pad 31 to be inspected. The data A is compared with the data B to obtain image data C of only the trace 3, and then the trace 3 of the probing needle applied on the pad 31 to be inspected is specified.
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