发明名称 MANUFACTURING METHOD OF GaN CRYSTAL AND BASE MATERIAL FOR CRYSTAL GROWTH
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a GaN crystal capable of using a GaN crystal thin film as a start crystal for GaN crystal growth, and to provide a base material of the crystal growth for it. SOLUTION: A GaN crystal thin film (especially GaN crystal thin film) 1 of thickness 100 μm or less which is formed as an independent thin film by a solution growth method, or the like, is jointed onto a substrate 2, to provide a crystal growth base material comprising one surface 1b of the thin film as a start surface for growing GaN crystal, on which the GaN crystal is grown.
申请公布号 JP2002319545(A) 申请公布日期 2002.10.31
申请号 JP20010123345 申请日期 2001.04.20
申请人 MITSUBISHI CABLE IND LTD 发明人 TADATOMO KAZUYUKI;OKAGAWA HIROAKI;OUCHI YOICHIRO;TSUNEKAWA TAKASHI
分类号 H01L21/02;H01L21/20;H01L21/208;H01L33/06;H01L33/12;H01L33/32 主分类号 H01L21/02
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